EVALUATION DEVICE, EVALUATION METHOD AND MANUFACTURING METHOD OF ARTICLE

• Main Author: MATSUDA HIDEKI
• Format: Patent
• Language: English; Japanese
• Published: 11.06.2020
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

To provide an evaluation device advantageous for evaluating the characteristics of an evaluation object surface.SOLUTION: An evaluation device for evaluating the characteristics of an evaluation object surface includes: an illuminating part which has a light emitting surface on which a bright part and a dark part are alternately arranged periodically and illuminates the evaluation object surface with pattern light from the light emitting surface; an imaging part which acquires at least three or more images by imaging the evaluation object surface under such a condition that the relative positions of the pattern light and the evaluation object surface are different from each other; and a control part which controls processing of evaluating the characteristics of the evaluation object surface. The control part generates at least two images including frequency components having the mutually-different orders from the at least three or more images acquired by the imaging part, generates a combined image by combining the at least two images so as to cancel the periodical intensity unevenness included in each of the at least two images, and obtains the characteristics of the evaluation object surface on the basis of the combined image.SELECTED DRAWING: Figure 1 【課題】被評価面の特性を評価するのに有利な評価装置を提供する。【解決手段】被評価面の特性を評価する評価装置であって、明部及び暗部が周期的に交互に配列された発光面を含み、前記発光面からのパターン光で前記被評価面を照明する照明部と、前記パターン光と前記被評価面との相対的な位置が互いに異なる条件で前記被評価面を撮像して少なくとも３つ以上の画像を取得する撮像部と、前記被評価面の特性を評価する処理を制御する制御部と、を有し、前記制御部は、前記撮像部で取得された前記少なくとも３つ以上の画像から互いに異なる次数の周波数成分を含む少なくとも２つの画像を生成し、前記少なくとも２つの画像のそれぞれに含まれる周期的な強度むらを打ち消すように、前記少なくとも２つの画像を合成して合成画像を生成し、前記合成画像に基づいて、前記被評価面の特性を求めることを特徴とする評価装置を提供する。【選択図】図１