PIEZOELECTRIC VIBRATION DEVICE

• Main Authors: ISHINO SATORU, KOJO TAKUYA
• Format: Patent
• Language: English; Japanese
• Published: 04.06.2020
• Subjects: BASIC ELECTRONIC CIRCUITRY; ELECTRICITY; GENERATION OF NOISE BY SUCH CIRCUITS; GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING,BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN ANON-SWITCHING MANNER; IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS

To provide a piezoelectric vibration device having a sandwich structure capable of preventing corrosion of a Ti film at the mounting of a substrate.SOLUTION: In a crystal oscillator 101, a crystal diaphragm 2, a first sealing member 3 that coats a first excitation electrode of the crystal diaphragm 2, and a second sealing member 4 coating a second excitation electrode of the crystal diaphragm 2 are boned by a bonding pattern layer, and an inner space in which a vibration part 22 of the crystal diaphragm 2 including the first excitation electrode and the second excitation electrode is tightly sealed is formed. The bonding pattern layer includes: a sealing pattern layer for tightly sealing the inner space by being formed in an annular shape so as to surround the vibration part 22 in a plan view (e.g., a vibration side first bonding pattern 251); and a conductive pattern layer for achieving a conduction of an electric wire and an electrode (e.g., a connection bonding pattern 253). The conductive pattern layer is distributed in a closed space of which the circumference is surrounded by the sealing pattern layer. In the sealing pattern layer, a GND potential is applied at the time of operation of the crystal oscillator 101.SELECTED DRAWING: Figure 4 【課題】基板実装時におけるＴｉ膜の腐食を防止できるサンドイッチ構造の圧電振動デバイスを提供する。【解決手段】水晶発振器１０１では、水晶振動板２と、水晶振動板２の第１励振電極を覆う第１封止部材３と、水晶振動板２の第２励振電極を覆う第２封止部材４とが接合パターン層によって接合され、第１励振電極と第２励振電極とを含む水晶振動板２の振動部２２を気密封止した内部空間が形成される。接合パターン層は、平面視で振動部２２を囲うように環状に形成されることで内部空間を気密封止する封止用パターン層（例えば振動側第１接合パターン２５１）と、配線および電極の導通を図るための導電用パターン層（例えば接続用接合パターン２５３）とを含んでおり、導電用パターン層は、周囲を前記封止用パターン層によって囲まれた閉空間内に配置される。封止用パターン層は、水晶発振器１０１の動作時にＧＮＤ電位が与えられる。【選択図】図４