RESISTOR TEMPERATURE SENSOR

• Main Authors: KIZAWA HIROSHI, UEDA YOJI, SAKAI TOMOKI, NISHINO FUMIO
• Format: Patent
• Language: English; Japanese
• Published: 04.06.2020
• Subjects: MEASURING; MEASURING QUANTITY OF HEAT; MEASURING TEMPERATURE; PHYSICS; TESTING; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR

To provide a resistor temperature sensor in which a lead terminal and an electrode pad are firmly connected.SOLUTION: The resistor temperature sensor comprises: an insulating substrate 2; a resistor 4 having a resistive part 5A and a pair of connecting parts 4B connected to both ends of the resistive part 5A and formed on the insulating substrate 2 with platinum thin film; a pair of electrode pads 6 formed so as to cover each of the pair of connecting parts 4B; a pair of lead terminals 10 connected to the pair of electrode pads 6, respectively; a lead terminal protective layer 8 formed so as to cover the pair of electrode pads 6; and a barrier layer 12 formed so as to cover at least a resistive part 4A. The electrode pads 6 include a first electrode pad layer 6A laminated on the insulating substrate 2 and composed of platinum-containing metal having high adhesiveness with the insulating substrate 2 and a second electrode pad layer 6B laminated on the first electrode pad layer 6A and composed of platinum-containing porous metal.SELECTED DRAWING: Figure 2 【課題】リード端子と電極パッドとが強固に接続された抵抗体温度センサを提供する。【解決手段】絶縁基板２と、抵抗部５Ａ、及び、抵抗部５Ａの両端部に接続された一対の接続部４Ｂを有し、絶縁基板２上に白金薄膜により形成された抵抗体４と、一対の接続部４Ｂのそれぞれを覆うように形成された一対の電極パッド６と、一対の電極パッド６のそれぞれに接続された一対のリード端子１０と、一対の電極パッド６を覆うように形成されたリード端子保護層８と、少なくとも抵抗部４Ａを覆うように形成されたバリア層１２と、を備え、電極パッド６は、絶縁基板２に積層され、絶縁基板２との密着性が高い白金系金属からなる第１電極パッド層６Ａと、第１電極パッド層６Ａに積層され、多孔質な白金系金属からなる第２電極パッド層６Ｂと、を有する。【選択図】図２