THERMAL AIR FLOWMETER

• Main Authors: OGATA KIMITOSHI, ISHIZUKA NORIO, YOGO TAKAYUKI, HOSHIKA HIROAKI
• Format: Patent
• Language: English; Japanese
• Published: 28.05.2020
• Subjects: MEASURING; MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL; METERING BY VOLUME; PHYSICS; TESTING

To improve measuring accuracy of a thermal air flowmeter.SOLUTION: A thermal air flowmeter has: a sub-passage that takes in part of fluid to be measured; a sensor chip arranged in the sub-passage, for measuring a flow rate of the fluid to be measured; an electronic component having a resistor inside, for converting a fluid flow rate detected by the sensor chip into an electric signal; and a substrate on which the sensor chip and the electronic component are mounted. The surface of the substrate on which the electronic component is mounted is covered with a filler.SELECTED DRAWING: Figure 3 【課題】熱式空気流量計の計測精度を向上させること。【解決手段】被計測流体の一部を取り込む副通路と、前記副通路に配置され前記被計測流体の流量を計測するセンサチップと、前記センサチップにより検出した流体流量を電気信号に変換し内部に抵抗体を有する電子部品と、前記センサチップ及び前記電子部品を搭載する基板と、を有し、前記基板は、前記電子部品が搭載された側の面が充填材により覆われている。【選択図】 図３