POLARIZATION MEASUREMENT OF MEASUREMENT TARGET AND CORRESPONDING TARGET DESIGN

To provide a target, a target element, and a target designing method that designs a target structure to have a high contrast above a specified contrast threshold against the background under a polarized light while having a low contrast below the specified contrast threshold against the background u...

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Bibliographic Details
Main Authors VLADIMIR LEVINSKI, NURIEL AMIR, ANDREW HILL, AMNON MANASSEN, AMIT ERAN, BARRY LOEVSKY, ROIE VOLKOVICH
Format Patent
LanguageEnglish
Japanese
Published 14.05.2020
Subjects
BASIC ELECTRIC ELEMENTS
COLORIMETRY
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT
MEASURING
PHYSICS
RADIATION PYROMETRY
SEMICONDUCTOR DEVICES
TESTING
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Summary:To provide a target, a target element, and a target designing method that designs a target structure to have a high contrast above a specified contrast threshold against the background under a polarized light while having a low contrast below the specified contrast threshold against the background under an unpolarized light.SOLUTION: A target has details on a device feature scale and meets a device design rule, but retains optical contrast when measured with polarized illumination, and thus can be effectively used as a metrology target. Design variations and respective measuring optical systems are also provided.SELECTED DRAWING: Figure 4C 【課題】標的構造を、偏光下でその背景に対して指定のコントラスト閾値を上回る高コントラストを有する一方で、非偏光下でその背景に対して該指定のコントラスト閾値を下回る低コントラストを有するように設計することを含む、標的、標的要素、及び標的設計方法を提供する。【解決手段】該標的は、デバイス形体スケールで詳細を有し、デバイス設計規則に適合するが、偏光照明を用いて測定されるときに光学コントラストを維持し、それ故に計測標的として効果的に使用され得る。設計の変形及びそれぞれの測定光学システムも同様に提供される。【選択図】図４Ｃ
Bibliography:Application Number: JP20190186136