SEMICONDUCTOR STORAGE DEVICE
To reduce power consumption.SOLUTION: According to an embodiment, a semiconductor storage device includes: a first wiring BL; a second wiring SL; a third wiring SG; a fourth wiring WL; a fifth wiring TG; a semiconductor layer 46 in which one end is located between the fourth wiring and the fifth wir...
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Main Authors | , , |
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Format | Patent |
Language | English Japanese |
Published |
07.05.2020
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Subjects | |
Online Access | Get full text |
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Summary: | To reduce power consumption.SOLUTION: According to an embodiment, a semiconductor storage device includes: a first wiring BL; a second wiring SL; a third wiring SG; a fourth wiring WL; a fifth wiring TG; a semiconductor layer 46 in which one end is located between the fourth wiring and the fifth wiring and the other end is connected to the first wiring; a memory cell MC; a conductive layer in which one end is connected to the second wiring and the other end is connected to the semiconductor layer; a first insulation layer 45 provided so as to extend between the third wiring and the semiconductor layer, between the fourth wiring and the semiconductor layer, and between the fifth wiring and the conductive layer; an oxide semiconductor layer 44 provided so as to extend between the fourth wiring and the first insulation layer and between the fifth wiring and the first insulation layer; and a second insulation layer 43 provided so as to extend between the fourth wiring and the oxide semiconductor layer and between the fifth wiring and the oxide semiconductor layer.SELECTED DRAWING: Figure 5
【課題】消費電力を低減する。【解決手段】実施形態によれば、半導体記憶装置は、第1配線BLと、第2配線SLと、第3配線SGと、第4配線WLと、第5配線TGと、一端が第4配線と第5配線の間に位置し、他端が第1配線に接続された半導体層46と、メモリセルMCと、一端が第2配線に接続され、他端が半導体層に接続された導電層と、第3配線と半導体層との間、第4配線と半導体層の間、及び第5配線と導電層の間に延在するように設けられた第1絶縁層45と、第4配線と第1絶縁層との間、及び第5配線と第1絶縁層との間に延在するように設けられた酸化物半導体層44と、第4配線と酸化物半導体層との間、及び第5配線と酸化物半導体層の間に延在するように設けられた第2絶縁層43と、を含む。【選択図】図5 |
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Bibliography: | Application Number: JP20180205642 |