MEASUREMENT SYSTEM AND METHOD FOR SETTING OBSERVATION CONDITION FOR MEASUREMENT DEVICE

• Main Authors: MIWA TAKAFUMI, DOBASHI TAKASHI, URANO KOTOKO, SAKAKIBARA SHIN, KAGATSUME AKIKO, SHIROSAKI YASUHIRO, KURATA AKIYOSHI, PARK MINSEOK, THANTIP KRASIENAPIBAL, TAMAKI HIROKAZU, MARUYAMA MOMOYO, SHINTANI ATSUKO
• Format: Patent
• Language: English; Japanese
• Published: 16.04.2020
• Subjects: BASIC ELECTRIC ELEMENTS; CALCULATING; COMPUTING; COUNTING; ELECTRIC DIGITAL DATA PROCESSING; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; PHYSICS

To set easily and at high speed an observation condition to be set to a measurement device for observing a specimen.SOLUTION: A measurement system comprising a measurement device for observing a specimen on the basis of an observation condition including a plurality of parameters and an observation condition database for storing data associating a retrieval key associated with a specimen with an observation condition includes a control unit for calculating information on an observation condition for a specimen. The control unit receives an observation condition retrieval request including a retrieval key associated with a target specimen; refers to the observation condition database to retrieve data that agrees with or is similar to the retrieval key associated with the target specimen included in the observation condition retrieval request; on the basis of retrieved first data, calculates a candidate observation condition for the measurement device for observing the target specimen; and outputs display data for presenting the candidate observation condition.SELECTED DRAWING: Figure 1 【課題】試料を観察する計測装置に設定する観察条件を容易かつ高速に設定する。【解決手段】複数のパラメータを含む観察条件に基づいて試料を観察する計測装置、並びに、試料に関連する検索キー及び観察条件を対応づけたデータを格納する観察条件データベースを備える計測システムであって、試料の観察条件に関する情報を算出する制御部は、ターゲット試料に関連する検索キーを含む観察条件検索要求を受け付け、観察条件データベースを参照して、観察条件検索要求に含まれるターゲット試料に関連する検索キーに一致又は類似するデータを検索し、検索された第一データに基づいてターゲット試料を観察するための計測装置の候補観察条件を算出し、候補観察条件を提示するための表示データを出力する。【選択図】図１