SUBSTRATE CONVEYANCE MECHANISM, SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE CONVEYANCE METHOD

To enhance a degree of freedom in arrangement of a substrate in a module to be a conveyance destination of the substrate and a conveyance mode of the substrate between modules.SOLUTION: A moving body moving in a lateral direction is provided with a support body to rotate around a vertical axis. A fi...

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Bibliographic Details
Main Author WAKABAYASHI SHINJI
Format Patent
LanguageEnglish
Japanese
Published 12.03.2020
Subjects
BASIC ELECTRIC ELEMENTS
CHAMBERS PROVIDED WITH MANIPULATION DEVICES
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HAND TOOLS
MANIPULATORS
PERFORMING OPERATIONS
PORTABLE POWER-DRIVEN TOOLS
SEMICONDUCTOR DEVICES
TRANSPORTING
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Summary:To enhance a degree of freedom in arrangement of a substrate in a module to be a conveyance destination of the substrate and a conveyance mode of the substrate between modules.SOLUTION: A moving body moving in a lateral direction is provided with a support body to rotate around a vertical axis. A first rotary shaft and a second rotary shaft are provided in each longitudinal direction at positions separated from each other in the lateral direction of the support body. A base end side of a first arm which has the tip side turning outside a rotating body is connected to the first rotary shaft. A base end side of a second arm which has the tip side turning outside the rotating body is connected to the second rotary shaft. The first arm forms a first substrate support region for supporting a substrate while the second arm forms a second substrate support region for supporting a substrate different from the substrate supported by the first arm. Furthermore, a lifting mechanism is provided to lift the second rotary shaft according to the direction of the second arm with respect to the rotating body so that the second arm does not interfere with the first arm.SELECTED DRAWING: Figure 6A 【課題】基板の搬送先のモジュールにおける当該基板の配置及びモジュール間での基板の搬送態様について自由度を高くすること。【解決手段】 横方向に移動する移動体に、縦軸まわりに回動するように支持体を設け、この支持体の横方向に互いに離れた位置に各々縦方向に第１の回動軸及び第２の回動軸を設ける。第１の回動軸には、その先端側が前記回動体の外側を旋回する第１のアームの基端側を接続する。また、第２の回動軸には、その先端側が前記回動体の外側を旋回する第２のアームの基端側を接続する。第1のアームは、基板を支持する第1の基板支持領域をなし、第２のアームは、第1のアームに支持される基板とは別の基板を支持する第２の基板支持領域をなす。さらに、第２のアームと第１のアームとが干渉しないように、前記回動体に対する第２のアームの向きに応じて第２の回動軸を昇降させる昇降機構を設ける。【選択図】図６Ａ
Bibliography:Application Number: JP20180164629