PRESSURE SENSOR

• Main Authors: SOEDA SUSUMU, SEKINE MASASHI, ISHIHARA TAKUYA
• Format: Patent
• Language: English; Japanese
• Published: 27.02.2020
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; SEMICONDUCTOR DEVICES; TESTING

To provide a pressure sensor in which the structure for reducing membrane stress is realized with practical manufacturing dimensions and zero-point shift that is caused by the deposition film of a sensor diaphragm is as small as possible.SOLUTION: The pressure sensor includes a sensor diaphragm 41 (diaphragm) that constitutes a part of a pressure chamber 44 in which measured fluid is introduced. One surface of the sensor diaphragm 41 that contacts the measured fluid includes a plurality of sloping surfaces 53, 54 that slope in the thickness direction of the sensor diaphragm 41 and face the inside of the pressure chamber 44.SELECTED DRAWING: Figure 3 【課題】膜応力低減のための構造を現実的な加工寸法で実現し、センサダイアフラムの堆積膜が原因で生じる零点シフトが可及的小さくなる圧力センサを提供する。【解決手段】被測定流体が導入される圧力室４４の壁の一部を構成するセンサダイアフラム４１（ダイアフラム）を備える。センサダイアフラム４１における被測定流体と接触する一方の面は、センサダイアフラム４１の厚み方向に対して傾斜しかつ圧力室４４の内方を指向する複数の傾斜面５３，５４を含んでいる。【選択図】 図３