MEMS MICROPHONE

To provide a MEMS microphone with improved microphone sensitivity.SOLUTION: In a MEMS microphone 10, in a through hole 21 of a substrate 20, the inner side surface 21a is curved so as to be depressed toward the substrate 20 in a sectional view. In this case, the volume of the through hole 21 increas...

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Bibliographic Details
Main Authors UEJIMA SATOSHI, OSANAI KATSUNORI, IIJIMA ATSUSHI
Format Patent
LanguageEnglish
Japanese
Published 06.02.2020
Subjects
DEAF-AID SETS
ELECTRIC COMMUNICATION TECHNIQUE
ELECTRICITY
LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PUBLIC ADDRESS SYSTEMS
TRANSPORTING
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Summary:To provide a MEMS microphone with improved microphone sensitivity.SOLUTION: In a MEMS microphone 10, in a through hole 21 of a substrate 20, the inner side surface 21a is curved so as to be depressed toward the substrate 20 in a sectional view. In this case, the volume of the through hole 21 increases, and the vibration resistance of a membrane 30 due to the air pressure in the through hole 21 decreases, and as a result, the microphone sensitivity improves.SELECTED DRAWING: Figure 6 【課題】マイク感度の向上が図られたＭＥＭＳマイクロフォンを提供する。【解決手段】 ＭＥＭＳマイクロフォン１０においては、基板２０の貫通孔２１では、内側面２１ａが、断面視において基板２０側に窪むように湾曲している。この場合、貫通孔２１の容積が増大し、貫通孔２１内の空気圧によるメンブレン３０の振動抵抗が低減して、その結果、マイク感度が向上する。【選択図】図６
Bibliography:Application Number: JP20180143625