LASER ANNEALING DEVICE, THIN FILM TRANSISTOR, LASER ANNEALING METHOD, AND MASK

• Main Authors: MATSUMOTO TAKAO, ETANI KOICHI, SHINOZUKA AKIHIRO, TANAKA MASAKAZU, NODERA NOBUTAKE, KOIWA SHINJI
• Format: Patent
• Language: English; Japanese
• Published: 06.02.2020
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

To provide a laser annealing device that can suppress a current value between the source and the drain of a thin film transistor from being different depending on the direction of a current, a thin film transistor, a laser annealing method, and a mask.SOLUTION: A laser annealing device includes a ma...