METHOD AND DEVICE FOR MEASURING SHAPE

• Main Authors: NAGAIKE YASUNARI, KUMAGAI TOSHIKI
• Format: Patent
• Language: English; Japanese
• Published: 06.02.2020
• Subjects: MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

To provide a method and a device for measuring a shape which can measure the shape of the surface of a measuring target object without using a reference member for correction.SOLUTION: The present invention includes the steps of: equipping a first probe to probe supporting means and obtaining first surface shape data of a measuring target object supported by measuring target object supporting means (S1); equipping a second probe to the probe supporting means and obtaining second surface shape data of a measuring target object supported by the measuring target object supporting means (S2); obtaining third surface shape data of the first probe supported by the measuring target object supporting means with the second probe being equipped to the probe supporting means (S3); equipping the second probe to the probe supporting means with at least one of the second probe and the measuring target object positioned in a changed direction and obtaining fourth surface shape data of the measuring target object supported by the measuring target object supporting means (S4); and calculating the surface shape of the measuring target object on the basis of the first to fourth surface shape data (S5).SELECTED DRAWING: Figure 8 【課題】校正用基準部材を使用しなくても、被測定物の面形状が高精度に測定できる形状測定方法／装置を提供する。【解決手段】プローブ支持手段に第１のプローブを装着し被測定物支持手段に支持された被測定物の第１面形状データを得る工程（Ｓ１）と、プローブ支持手段に第２のプローブを装着し被測定物支持手段に支持された被測定物の第２面形状データを得る工程（Ｓ２）と、プローブ支持手段に第２のプローブを装着した状態で被測定物支持手段に支持された第１のプローブの第３面形状データを得る工程（Ｓ３）と、第２のプローブと被測定物の少なくとも一方の向きを変えた状態でプローブ支持手段に第２のプローブを装着し被測定物支持手段に支持された被測定物の第４面形状データを得る工程（Ｓ４）と、第１〜第４面形状データに基づいて被測定物の面形状を算出する工程（Ｓ５）と、を備える。【選択図】図８