GAS ANALYZER AND GAS ANALYSIS METHOD

• Main Authors: NISHIKAWA YUSUKE, KINUGAWA MASARU
• Format: Patent
• Language: English; Japanese
• Published: 06.02.2020
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

To be able to analyze residual gas with high-sensitivity, regardless of whether the amount of the residual gas in a specimen is large or small.SOLUTION: There are provided: a sample chamber 1 for extracting residual gas from a specimen 3 in vacuum; an intermediate chamber 4 connected to the sample chamber 1 via a first vacuum valve in vacuum; a first analytical chamber 6 connected to the intermediate chamber 4 via a second vacuum valve in the vacuum state; a second analysis chamber 7 connected to the intermediate chamber 4 via an orifice 5 in the vacuum state; a vacuum gauge for measuring gas volume in the sample chamber 1; an exhaust section 8 for exhausting residual gas from the second analysis chamber 7; a control operation unit 9 that closes the second vacuum valve when the gas amount is equal to or more than a threshold value and opens the second vacuum valve when the gas amount is less than the threshold value; and one or more mass spectrometers to analyze the residual gas taken into the second analysis chamber 7 when the gas amount is equal or more than the threshold value, or to analyze the residual gas taken into the first analysis chamber 6 when the gas amount is less than the threshold value.SELECTED DRAWING: Figure 1 【課題】本発明は、試験体中の残留ガスの量が多い場合でも少ない場合でも、残留ガスを高感度に分析を可能とすることを目的とする。【解決手段】真空中で試験体３から残留ガスを取り出す試料室１と、真空中で試料室１と、第一の真空バルブを介して接続される中間室４と、真空状態で中間室４と、第二の真空バルブを介して接続される第一の分析室６と、真空状態で中間室４と、オリフィス５を介して接続される第二の分析室７と、試料室１のガス量を計測する真空計と、第二の分析室７から残留ガスを排気する排気部８と、ガス量が閾値以上である場合に第二の真空バルブを閉じ、ガス量が閾値未満である場合に第二の真空バルブを開ける制御演算部９と、ガス量が閾値以上の場合に、第二の分析室７に取り込まれた残留ガスを分析し、ガス量が閾値未満の場合に、第一の分析室６に取り込まれた残留ガスを分析する一台又は複数の質量分析計とを備える。【選択図】 図１