PROCESSING LIQUID SWITCHING DEVICE

• Main Authors: NOKURA NOBORU, KOIKE YOSHIO
• Format: Patent
• Language: English; Japanese
• Published: 23.01.2020
• Subjects: BASIC ELECTRIC ELEMENTS; DRESSING OR CONDITIONING OF ABRADING SURFACES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS; GRINDING; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; PERFORMING OPERATIONS; POLISHING; SEMICONDUCTOR DEVICES; TRANSPORTING

To provide a processing liquid switching device that can prevent rotation movement of a sluice pipe from being inhibited and prevent processing liquid from soiling a periphery of the device.SOLUTION: The processing liquid switching device comprises: a discharge pipe 2 through which a polishing agent K is discharged from a discharge port 23 at a tip 22; a sluice pipe 10, one end 31 of which the tip 22 of the discharge pipe 2 is inserted into through a first clearance S1 in a circumferential direction and the other end 42 of which a discharge port 46 is formed at, which can rotate with a shaft direction O of the discharge pipe 2 as a rotation center; and a liquid receiving pipe 5 which has at one end 51 a receiving port 55, into which the other end 42 of the sluice pipe 10 is inserted through a second clearance S2 in the circumferential direction, which is held coaxially with respect to the discharge pipe 2, and has at the other end 52 a first separation port 56a and a second separation port 56b. A discharge port 46 is arranged at a position where an opening center O1 is offset with respect to a shaft direction O of a guide pipe 4, and a holding mechanism 30 that rotatably holds the guide pipe 4 is arranged at an outer periphery side of the sluice pipe 10.SELECTED DRAWING: Figure 2 【課題】樋管の回転動作が阻害されることを防止すると共に、処理液による装置周辺の汚染を防ぐことができる処理液切換装置を提供すること。【解決手段】先端２２の排出口２３から研磨剤Ｋを排出する排出管２と、一端３１に排出管２の先端２２が周方向の第１隙間Ｓ１を介して差し込まれ、他端４２に吐出口４６が形成されると共に、排出管２の軸方向Ｏを回転中心として回転可能な樋管１０と、樋管１０の他端４２が周方向の第２隙間Ｓ２を介して差し込まれると共に排出管２に対して同軸状態に保持された受け口５５を一端５１に有し、他端５２に第１分離口５６ａ及び第２分離口５６ｂを有する液受管５と、を備え、吐出口４６は、開口中心Ｏ１が誘導管４の軸方向Ｏに対してオフセットした位置に設定され、誘導管４を回転可能に保持する保持機構３０は、樋管１０の外周側に配置されている構成とした。【選択図】図２