ELECTRON MICROSCOPE

• Main Authors: SHIMIZU YUUKO, YAMASHITA JUN, HOSOKI NAOKI, IIJIMA HIROBUMI
• Format: Patent
• Language: English; Japanese
• Published: 16.01.2020
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

To provide an electron microscope capable of acquiring a good electron microscope image by using a phase plate.SOLUTION: An electron microscope 100 comprises: an electron microscope body 10 including a phase plate 15 for giving change of phase to electron wave, a phase plate movement mechanism 16 for moving the phase plate 15 and a detector 19 for acquiring an image formed of an electron ray permeated a specimen S; and a control section 20 for controlling the electron microscope body 10. The control section 20 performs phase plate image acquisition processing for acquiring a phase plate image including the image of the phase plate 15, unevenness determination processing for determining whether or not there are irregularities in the phase plate 15, on the basis of the phase plate image, and movement mechanism control processing for controlling the phase plate movement mechanism 16 so that the phase plate 15 moves, when a determination is made that there are irregularities in the phase plate.SELECTED DRAWING: Figure 1 【課題】位相板を用いて良好な電子顕微鏡像を取得できる電子顕微鏡を提供する。【解決手段】電子顕微鏡１００は、電子波に位相の変化を与える位相板１５、位相板１５を移動させる位相板移動機構１６、および試料Ｓを透過した電子線で形成される像を取得する検出器１９を含む電子顕微鏡本体１０と、電子顕微鏡本体１０を制御する制御部２０と、を含み、制御部２０は、位相板１５の像を含む位相板像を取得する位相板像取得処理と、位相板像に基づいて、位相板１５に凹凸があるか否かを判定する凹凸判定処理と、凹凸があると判定した場合、位相板１５が移動するように位相板移動機構１６を制御する移動機構制御処理と、を行う。【選択図】図１