APPARATUS AND METHOD FOR MANUFACTURING DISPLAY PANEL

• Main Authors: YADA SHUHEI, NENDAI KENICHI, SHINOKAWA TAIJI, YAMAGUCHI JUN
• Format: Patent
• Language: English; Japanese
• Published: 16.01.2020
• Subjects: ADVERTISING; BASIC ELECTRIC ELEMENTS; CLADDING OR PLATING BY SOLDERING OR WELDING; CRYPTOGRAPHY; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; DISPLAY; DISPLAYING; EDUCATION; ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; LABELS OR NAME-PLATES; MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; PERFORMING OPERATIONS; PHYSICS; SEALS; SEMICONDUCTOR DEVICES; SIGNS; SOLDERING OR UNSOLDERING; TRANSPORTING; WELDING; WORKING BY LASER BEAM

To prevent the quality of a display panel from being reduced while reducing the number of processes or a manufacturing cost by patterning a thin film by laser processing.SOLUTION: An apparatus for manufacturing a display panel, capable of manufacturing the display panel obtained by laminating a plurality of thin films including an organic film on a substrate includes a thin film patterning device 200 for patterning a thin film in the state of storing a substrate 110 having the thin film in a vacuum chamber. The vacuum chamber 221 has a window pane 222 transmitting a laser beam; the thin film patterning device 200 arranged in the outside of the vacuum chamber 221 emits the laser beam LB toward the substrate 110 having the thin film through the window pane 222 to partially remove the thin film; and cover glass 225 transmitting the laser beam is arranged at a position separated from the substrate 110 having the thin film between the window pane 222 and the substrate 110 having the thin film in the vacuum chamber 221.SELECTED DRAWING: Figure 1 【課題】レーザー加工により薄膜のパターンニングを行って、工数や製造コストの低減を図りつつ、表示パネルの品質を損なわないようにする。【解決手段】有機膜を含む複数の薄膜が基板上に積層されてなる表示パネルを製造する表示パネル製造装置であって、真空チャンバー内に薄膜付基板１１０を収納した状態で、薄膜をパターニングする薄膜パターニング装置２００を備え、真空チャンバー２２１は、レーザー光を透過する窓ガラス２２２を有しており、薄膜パターニング装置２００は、真空チャンバー２２１の外部に配されて、窓ガラス２２２を介して、レーザー光ＬＢを薄膜付基板１１０に向けて射出し、薄膜を部分的に除去する。真空チャンバー２２１内における、窓ガラス２２２と、薄膜付基板１１０との間であって、薄膜付基板１１０と離間した位置に、レーザー光を透過するカバーガラス２２５が配されている。【選択図】図１