LIGHT IRRADIATION DEVICE, OPTICAL EVALUATION DEVICE, AND GOODS MANUFACTURING METHOD

• Main Author: UEMURA TAKANORI
• Format: Patent
• Language: English; Japanese
• Published: 16.01.2020
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

To provide a technique that is advantageous for the downsizing of an inspection device.SOLUTION: A light irradiation device for irradiating an object with light includes: a plurality of line-shaped shielding units for shielding light at least partly and arranged at given center intervals; and a plurality of line-shaped light irradiation units arranged so as to overlap some of the plurality of light shielding units so that the object is irradiated with light. The plurality of light irradiation units are arranged so as to form a period two-fold or more of the center intervals of the plurality of light shielding units.SELECTED DRAWING: Figure 1 【課題】検査装置の小型化に有利な技術を提供する。【解決手段】物体に光を照射する光照射装置は、一定の中心間隔で配置され、少なくとも部分的に光を遮断するライン状の複数の遮光部と、前記物体に光を照射するように前記複数の遮光部のうちの一部の遮光部に対して重なるように配置されたライン状の複数の光照射部と、を含み、前記複数の光照射部は、前記複数の遮光部の前記中心間隔の２倍以上の周期を形成するように配置されている。【選択図】図１