MAINTENANCE DEVICE

• Main Authors: HIROSE JUN, UEDA TAKEHIRO, TEZUKA KAZUYUKI
• Format: Patent
• Language: English; Japanese
• Published: 09.01.2020
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

To perform easy maintenance without exposing the inside of a processing container to outside air.SOLUTION: A maintenance device includes a cover and a fixing member. The cover is made into a vacuum atmosphere during substrate processing, and is formed in size corresponding to the boundary between first and second parts of a processing container that can be separated into the first and second parts or the opening surface separating the first and second parts, and has airtightness and at least partially visual transparency. The fixing member tightly fixes the cover along a boundary between the first part and the second part of the processing container or on the opening surface where the first part and the second part are separated.SELECTED DRAWING: Figure 3 【課題】処理容器内を外気にさらすことなく簡易にメンテナンスを行うこと。【解決手段】メンテナンス装置は、カバーと、固定部材とを有する。カバーは、基板処理の際に真空雰囲気とされ、第１パーツと第２パーツに分離可能とされた処理容器の第１パーツと第２パーツの境界線または第１パーツと第２パーツとを分離した開口面に対応するサイズに形成され、気密性および少なくとも一部に視覚的透過性を有する。固定部材は、カバーを、処理容器の第１パーツと第２パーツの境界線に沿ってまたは第１パーツと第２パーツとを分離した開口面に密着固定する。【選択図】図３