COMPOUND, MANUFACTURING METHOD OF COMPOUND, AND COMPOSITION FOR ORGANIC FILM FORMATION

• Main Authors: WATANABE TAKESHI, DANIEL PAUL SANDERS, SAWAMURA TAKASHI, OGIWARA TSUTOMU, ARAIDA KEISUKE, GREGORY BREYTA, RUDY J WOJTECKI, NAGAI YOKO, ALEXANDER EDWARD HESS, TACHIBANA SEIICHIRO
• Format: Patent
• Language: English; Japanese
• Published: 26.12.2019
• Subjects: ACYCLIC OR CARBOCYCLIC COMPOUNDS; CHEMISTRY; COMPOSITIONS BASED THEREON; MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVINGCARBON-TO-CARBON UNSATURATED BONDS; METALLURGY; ORGANIC CHEMISTRY; ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP

To provide a compound which is cured under a deposition condition not only in air, but also in inert gas, generates no by-product, and can form an organic underlay film not only excellent in heat resistance or impregnation or flattening property of pattern formed on a substrate, but also good in dry...