SEMICONDUCTOR INSPECTION DEVICE AND SEMICONDUCTOR INSPECTION METHOD

• Main Authors: WATABE HEIJI, HOSOI TAKUJI, SHIMURA TAKAYOSHI, NISHIMURA TATSUHIKO, NAKANISHI HIDETOSHI
• Format: Patent
• Language: English; Japanese
• Published: 19.12.2019
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; SEMICONDUCTOR DEVICES; TESTING

To provide a technique for satisfactorily inspecting an interfacial characteristic between an insulation layer and a semiconductor layer.SOLUTION: A semiconductor inspection device 1 is a device for inspecting an interfacial characteristic between an insulation layer 92 and a semiconductor layer 90....