RETAINER AND MANUFACTURING METHOD THEREFOR
To control a temperature distribution in a first surface of a ceramic member by suppressing generation of temperature singularity at a high or low temperature.SOLUTION: The retainer includes: a substantially planar first surface substantially perpendicular to a first direction and ceramic member for...
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Main Authors | , , , |
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Format | Patent |
Language | English Japanese |
Published |
12.12.2019
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Subjects | |
Online Access | Get full text |
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Summary: | To control a temperature distribution in a first surface of a ceramic member by suppressing generation of temperature singularity at a high or low temperature.SOLUTION: The retainer includes: a substantially planar first surface substantially perpendicular to a first direction and ceramic member formed with a plurality of protrusions on the first surface. A non-formation part formed with no protrusions includes a first surface region and a second surface region whose surface roughness (Ra) is smaller than that of the first surface region.SELECTED DRAWING: Figure 5
【課題】高温または低温の温度特異点の発生を抑制することができ、セラミックス部材の第1の表面における温度分布を制御する。【解決手段】保持装置は、第1の方向に略垂直な略平面状の第1の表面を有し、第1の表面に複数の突起が形成されたセラミックス部材を備える。セラミックス部材の第1の表面のうち、突起が形成されていない非形成部分は、第1の表面領域と、表面粗さ(Ra)が第1の表面領域の表面粗さに比べて小さい第2の表面領域と、を含んでいる。【選択図】図5 |
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Bibliography: | Application Number: JP20180109258 |