RETAINER AND MANUFACTURING METHOD THEREFOR

• Main Authors: DEGUCHI HIROYUKI, HASEGAWA MASAMI, SUZUKI ATSUSHI, SUZUKI TETSUO
• Format: Patent
• Language: English; Japanese
• Published: 12.12.2019
• Subjects: BASIC ELECTRIC ELEMENTS; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR; ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERATION; SEMICONDUCTOR DEVICES

To control a temperature distribution in a first surface of a ceramic member by suppressing generation of temperature singularity at a high or low temperature.SOLUTION: The retainer includes: a substantially planar first surface substantially perpendicular to a first direction and ceramic member formed with a plurality of protrusions on the first surface. A non-formation part formed with no protrusions includes a first surface region and a second surface region whose surface roughness (Ra) is smaller than that of the first surface region.SELECTED DRAWING: Figure 5 【課題】高温または低温の温度特異点の発生を抑制することができ、セラミックス部材の第１の表面における温度分布を制御する。【解決手段】保持装置は、第１の方向に略垂直な略平面状の第１の表面を有し、第１の表面に複数の突起が形成されたセラミックス部材を備える。セラミックス部材の第１の表面のうち、突起が形成されていない非形成部分は、第１の表面領域と、表面粗さ（Ｒａ）が第１の表面領域の表面粗さに比べて小さい第２の表面領域と、を含んでいる。【選択図】図５