TEMPLATE FOR IMPRINT, MANUFACTURING METHOD OF THE SAME, AND IMPRINT METHOD

To provide a template for an imprint, capable of manufacturing a pattern structure without defection.SOLUTION: A template for an imprint comprises: a pattern substrate having a first surface, a second surface opposite to the first surface, and a side surface continued between an outer edge of the fi...

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Bibliographic Details
Main Authors IIMURA KEITA, YAMADA JUNICHI
Format Patent
LanguageEnglish
Japanese
Published 12.12.2019
Subjects
AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
PERFORMING OPERATIONS
SEMICONDUCTOR DEVICES
SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR
SHAPING OR JOINING OF PLASTICS
TRANSPORTING
WORKING OF PLASTICS
WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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Summary:To provide a template for an imprint, capable of manufacturing a pattern structure without defection.SOLUTION: A template for an imprint comprises: a pattern substrate having a first surface, a second surface opposite to the first surface, and a side surface continued between an outer edge of the first surface and an outer edge of the second surface, and made by forming an uneven pattern on the first surface; a frame body containing an opening part which can expose the at least uneven pattern and a side wall part surrounding the side surface so as to provide a first gap between itself and the side surface of the pattern substrate; and a bonding part positioned in the first gap between the side surface of the pattern substrate and the side wall part of the frame body, and bonding the pattern substrate and the frame body, wherein, in a side surface view with the first surface of the pattern substrate directed upward, the first surface of the pattern substrate, an upper surface of the frame body, and an upper surface of the bonding part positioned in the first gap are actually formed in one surface.SELECTED DRAWING: Figure 1 【課題】欠陥のないパターン構造体を製造可能なインプリント用テンプレートを提供する。【解決手段】第１面、第１面に対向する第２面、並びに第１面の外縁及び第２面の外縁の間に連続する側面を有し、第１面に凹凸パターンが形成されてなるパターン基板と、少なくとも凹凸パターンを露出させ得る開口部、及びパターン基板の側面との間に第１間隙を設けるようにして側面を取り囲む側壁部を含む枠体と、パターン基板の側面及び枠体の側壁部の間の第１間隙に位置し、パターン基板及び枠体を接合する接合部と、を備え、パターン基板の第１面を上方に向けた側面視において、パターン基板の第１面と、枠体の上面と、第１間隙に位置する接合部の上面とが実質的に面一であるインプリント用テンプレートが提供される。【選択図】 図１
Bibliography:Application Number: JP20180107402