DEVICE AND METHOD FOR DETECTING ABNORMAL VIBRATION, SIGNAL EXTRACTION CIRCUIT, AND DIAPHRAGM VACUUM GAGE

• Main Authors: SOEDA SUSUMU, SEKINE MASASHI, ISHIHARA TAKUYA
• Format: Patent
• Language: English; Japanese
• Published: 14.11.2019
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING; TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES; TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR

To detect abnormal vibration generated in manufacturing equipment at a relatively low cost.SOLUTION: A signal extraction circuit 12 extracts, from a sensor signal SS of a diaphragm type pressure sensor 11 which detects internal pressure in a vessel or a pipeline used in a process of manufacturing equipment, and a detection pressure Pout indicating a main signal constituent related to a process pressure PP changing with the process, and an abnormal vibration fluctuation AV indicating abnormal vibration generated in the manufacturing equipment. An arithmetic processing circuit 13 detects the abnormal vibration fluctuation AV by applying arithmetic processing to the detection pressure Pout extracted by the signal extraction circuit 12.SELECTED DRAWING: Figure 1 【課題】比較的低コストで製造設備で発生した異常振動を検出する。【解決手段】信号抽出回路１２が、製造設備のプロセスで使用される容器または配管の内部圧力を検出する隔膜式圧力センサ１１のセンサ信号ＳＳから、プロセスに応じて変化するプロセス圧力ＰＰと、製造設備で発生する異常振動を示す異常振動変動ＡＶとに関する主な信号成分を示す検出圧力Ｐｏｕｔを抽出し、演算処理回路１３が、信号抽出回路１２で抽出された検出圧力Ｐｏｕｔを演算処理することにより異常振動変動ＡＶを検出する。【選択図】 図１