LIGHT RECEIVING ELEMENT AND MANUFACTURING METHOD THEREOF

• Main Authors: TANAKA YUMA, SUGIMORI RYO
• Format: Patent
• Language: English; Japanese
• Published: 31.10.2019
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

To provide a light receiving element that can reduce the reflectance at a shading part and a manufacturing method thereof.SOLUTION: A light receiving element 1 includes a semiconductor part 2 having a first surface 1s including a light receiving part 1A and a light shielding part 1B, and a metal film 5 for light shielding, which is provided on the light shielding part 1B. The metal film 5 has a second surface 5s facing the opposite side of the first surface 1s and receiving light. A plurality of recesses 6 are formed on the second surface 5s. The inner surface 6s of a recess 6 includes a curved surface portion 7 that bends such that the size of the recess 6 in the direction along the second surface 5s decreases from the second surface 5s toward the bottom 6b of the recess 6.SELECTED DRAWING: Figure 4 【課題】遮光部における反射率を低減可能な受光素子、及び、受光素子の製造方法を提供する。【解決手段】受光素子１は、受光部１Ａと遮光部１Ｂとを含む第１面１ｓを有する半導体部２と、遮光部１Ｂ上に設けられた遮光のための金属膜５と、を備える。金属膜５は、第１面１ｓと反対側に臨み光の入射を受ける第２面５ｓを有する。第２面５ｓには、複数の凹部６が形成されている。凹部６の内面６ｓは、第２面５ｓから凹部６の底部６ｂに向かうにつれて第２面５ｓに沿った方向における凹部６のサイズが縮小するように曲がる曲面部７を含む。【選択図】図４