CONFOCAL OPTICAL SYSTEM MEASUREMENT DEVICE, AND CONFOCAL OPTICAL SYSTEM MEASUREMENT DEVICE MANUFACTURING METHOD

• Main Authors: MIZUGUCHI TSUTOMU, OTSUKA HARUKA, SHIRAIWA HISASHI
• Format: Patent
• Language: English; Japanese
• Published: 31.10.2019
• Subjects: OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS

To improve accuracy of a light reception position of light from a sample in a multi-focus and confocal configuration.SOLUTION: A confocal optical system measurement device comprises: a light source; a projection light fiber group; a light reception fiber group; a spectrometer; and a confocal optical system for condensing a plurality of light fluxes from a plurality of projection light fiber respectively, irradiating a sample with the condensed light flux, and image-forming the plurality of light fluxes from a plurality of light-condensed points in the sample to each of the plurality of light reception fibers. The light projection fiber group includes a plurality of light projection fibers receiving light from the light source, and the light reception fiber group includes a plurality of light reception fibers for guiding the received light to the spectrometer. A shape of an end surface of the light projection fiber group and a shape of an end surface of the light reception fiber are mirror-surface symmetric, and in the light projection fiber group and the light reception fiber group, the shape of the end surface of the light projection fiber group and a shape of an end surface of the corresponding light reception fiber are mirror-surface symmetric.SELECTED DRAWING: Figure 10 【課題】多焦点かつ共焦点の構成において、試料からの光の受光位置の精度を向上させる。【解決手段】共焦点光学系測定装置は、光源と、投光ファイバ群と、受光ファイバ群と、分光器と、前記複数の投光ファイバからの複数の光束をそれぞれ集光して試料に照射し、前記試料における複数の集光点からの複数の光束を前記複数の受光ファイバにそれぞれ結像するための共焦点光学系とを備え、前記投光ファイバ群は、前記光源からの光を受ける複数の投光ファイバを含み、前記受光ファイバ群は、受けた光を前記分光器へ導くための複数の受光ファイバを含み、前記投光ファイバ群の端面の形状および前記受光ファイバ群の端面の形状が鏡面対称であり、前記投光ファイバ群および前記受光ファイバ群において、前記投光ファイバの端面の形状および対応の前記受光ファイバの端面の形状が鏡面対称である。【選択図】図１０