SCAN TYPE PROBE MICROSCOPE AND LIGHT INTENSITY ADJUSTING METHOD

• Main Authors: ARAI HIROSHI, NAKAJIMA HIDEO, FUJINO KEITA, IIDA EIJI, HIRAIDE MASATO, IKEDA YUICHIRO, YAMAZAKI KENJI, WATANABE KAZUMA
• Format: Patent
• Language: English; Japanese
• Published: 31.10.2019
• Subjects: APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]; MEASURING; PHYSICS; SCANNING-PROBE TECHNIQUES OR APPARATUS; TESTING

To provide a scan type probe microscope capable of improving user's operability.SOLUTION: A scan type probe microscope 1 comprises a light source 4, a detector 7, a housing, an opening/closing door, an opening/closing sensor 14, and a control part 16. The opening/closing door is provided on the housing. The control part 16 functions even as a light intensity variation processing part 164. When the opening/closing sensor 14 detects the opening/closing door being opened or closed, the scan type probe microscope 1 has irradiation light from the light source 4 automatically varied in intensity through the light intensity variation processing part 164 based upon a detection result of the opening/closing sensor 14. Consequently, manual light intensity adjusting operation by a user can be omitted to improve user's operability.SELECTED DRAWING: Figure 2 【課題】ユーザの作業性を向上できる走査型プローブ顕微鏡を提供する。【解決手段】走査型プローブ顕微鏡１は、光源４、検出器７、筐体、開閉扉、開閉センサ１４及び制御部１６を備えている。開閉扉は、筐体に設けられている。制御部１６は、光強度変更処理部１６４としても機能する。走査型プローブ顕微鏡１では、開閉扉の開閉を開閉センサ１４が検知すると、開閉センサ１４の検知結果に基づいて、光強度変更処理部１６４により光源４から照射される光の強度が自動で変更される。そのため、ユーザによる手動での光の強度調整作業を省くことができ、ユーザの作業性を向上できる。【選択図】図２