X-RAY DETECTOR AND X-RAY MEASURING DEVICE USING THE SAME

• Main Authors: TAKAHAMA TAKASHI, HOZAWA KAZUYUKI
• Format: Patent
• Language: English; Japanese
• Published: 31.10.2019
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASUREMENT OF NUCLEAR OR X-RADIATION; MEASURING; PHYSICS; TESTING

To provide an X-ray detector and an X-ray measuring device which can exhibit an increased efficiency of detecting an X-ray while maintaining a high resolution.SOLUTION: An X-ray detector 12 includes: a first SDD chip 1 detecting a fluorescent x-ray generating from a sample with a first energy sensitivity; a second SDD chip 2 detecting the fluorescent x-ray with a second energy sensitivity, which is different from the first energy sensitivity; a first signal line 3 electrically connected to the first SDD chip 1; and a second signal line 4 electrically connected to the second SDD chip 2. The X-ray detector 12 further has an amplifier 5 electrically connected to the first signal line 3 and the second signal line 4 and amplifying a signal.SELECTED DRAWING: Figure 1 【課題】Ｘ線検出器およびＸ線計測装置において、高い分解能を維持しつつＸ線の検出効率を高める。【解決手段】Ｘ線検出器１２は、試料から発生する蛍光Ｘ線を第１のエネルギー感度で検出する第１ＳＤＤチップ１と、上記蛍光Ｘ線を上記第１のエネルギー感度と異なる第２のエネルギー感度で検出する第２ＳＤＤチップ２と、第１ＳＤＤチップ１と電気的に接続された第１の信号線３と、第２ＳＤＤチップ２と電気的に接続された第２の信号線４と、を有する。さらにＸ線検出器１２は、第１の信号線３と第２の信号線４とに電気的に接続され、かつ信号を増幅するアンプ５を有している。【選択図】図１