EPITAXY PROCESS SYSTEM COMPRISING AUTOMATIC CONVEYANCE SYSTEM, AND AUTOMATIC CONVEYANCE METHOD OF THE SAME

• Main Authors: OISHI TAKAHIRO, SUDA NOBORU, HAN ZONG XUN, HUANG TSAN-HUA, WONG KIAN POH
• Format: Patent
• Language: English; Japanese
• Published: 24.10.2019
• Subjects: AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUSPOLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR; BASIC ELECTRIC ELEMENTS; CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; CRYSTAL GROWTH; DIFFUSION TREATMENT OF METALLIC MATERIAL; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; REFINING BY ZONE-MELTING OF MATERIAL; SEMICONDUCTOR DEVICES; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITHDEFINED STRUCTURE; SINGLE-CRYSTAL-GROWTH; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL ORUNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL

To provide an epitaxy process system comprising an automatic conveyance system and an automatic conveyance method thereof.SOLUTION: In an epitaxy process system comprising an automatic conveyance system and an automatic conveyance method thereof according to the present invention, the epitaxy process system is provided with a reaction module, a conveyance module, and a load lock module, and the conveyance module and the load lock module severally has two temporary storage mechanisms. A susceptor on which a wafer which has not undergone epitaxial reaction is mounted is moved from one of the two temporary storage mechanisms of the load lock module or a temporary storage mechanism of the conveyance module to a reaction cavity part of the reaction module, and epitaxial reaction is performed in combination with a ceiling. Thus, the conveyance module performs automatic conveyance of the susceptor and the ceiling between the reaction module, the conveyance module and the load lock module.SELECTED DRAWING: Figure 4 【課題】自動搬送システムを具備するエピタキシープロセスシステム及びその自動搬送方法を提供する。【解決手段】本発明の自動搬送システムを具備するエピタキシープロセスシステム及びその自動搬送方法は、エピタキシープロセスシステムは反応モジュール、搬送モジュール、及びロードロックモジュールが提供され、搬送モジュール及びロードロックモジュールは２つの仮貯蔵機構をそれぞれ有する。エピタキシャル反応を経ていないウェハーが載置されるサセプタが、ロードロックモジュールの２つの仮貯蔵機構の１つまたは前記搬送モジュールの仮貯蔵機構から反応モジュールの反応キャビティ箇所に移動され、天井と組み合わせられてエピタキシャル反応が行われる。これにより、搬送モジュールが反応モジュール、搬送モジュール、及びロードロックモジュールの間でサセプタ及び天井の自動搬送を行う。【選択図】図４