CHARGED PARTICLE BEAM APPARATUS

To automatically repeat operation of extracting a sample piece formed by processing a sample with an ion beam to move to a sample piece holder.SOLUTION: The charged particle beam apparatus includes a computer that performs control to irradiate a deposition film attached to a needle with a charged pa...

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Bibliographic Details
Main Authors SUZUKI MASATO, TOMIMATSU SATOSHI, SATO MAKOTO, ASAHATA TATSUYA
Format Patent
LanguageEnglish
Japanese
Published 17.10.2019
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Summary:To automatically repeat operation of extracting a sample piece formed by processing a sample with an ion beam to move to a sample piece holder.SOLUTION: The charged particle beam apparatus includes a computer that performs control to irradiate a deposition film attached to a needle with a charged particle beam from a charged particle beam irradiation optical system without rotating the needle that fixes a sample piece to a sample holder.SELECTED DRAWING: Figure 1 【課題】イオンビームによる試料の加工によって形成された試料片を摘出して試料片ホルダに移設させる動作を自動で繰返す。【解決手段】荷電粒子ビーム装置は、試料片を試料ホルダに固定させたニードルを回転させることなく、荷電粒子ビーム照射光学系から荷電粒子ビームをニードルに付着したデポジション膜に照射させる制御を施すコンピュータを備える。【選択図】図１
Bibliography:Application Number: JP20180069105