AIR STAGE DEVICE AND SERVO DEVICE

• Main Authors: YOSHIDA TATSUYA, HAMADA SHINYA
• Format: Patent
• Language: English; Japanese
• Published: 10.10.2019
• Subjects: BEARINGS; BLASTING; CONTROL OR REGULATING SYSTEMS IN GENERAL; CONTROLLING; ELEMENTS OR CRANKSHAFT MECHANISMS; ENGINEERING ELEMENTS AND UNITS; FLEXIBLE SHAFTS; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS; HEATING; LIGHTING; MECHANICAL ENGINEERING; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS; PHYSICS; REGULATING; ROTARY BODIES OTHER THAN GEARING ELEMENTS; SHAFTS; SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES; THERMAL INSULATION IN GENERAL; WEAPONS

To provide a servo device or air stage device having both stability and rapid response.SOLUTION: A servo device 100 comprises a fluid pressure actuator 110 and a drive part 130. The fluid pressure actuator 110 includes: a first member 112 having a pressure chamber 114 therein; and a second member 120 having a partition wall 122 that divides the pressure chamber 114 into two spaces 116A, 116B. The drive part 130 controls relative displacement between the first member 112 and the second member 120 by controlling fluid flowing in and out of the two spaces 116A, 116B. A feedback controller 134 generates a control command CNTso that the amount of displacement Papproaches a target value P. A notch filter 136, provided on the path of the control command CNT, is configured to be able to control a rejection frequency faccording to the amount of displacement (Por P).SELECTED DRAWING: Figure 1 【課題】安定性と高速応答性を両立したサーボ装置あるいはエアステージ装置を提供する。【解決手段】サーボ装置１００は、流体圧アクチュエータ１１０および駆動部１３０を備える。流体圧アクチュエータ１１０は、内部に圧力室１１４を有する第１部材１１２と、圧力室１１４を２つの空間１１６Ａ，１１６Ｂに区画する隔壁１２２を有する第２部材１２０と、を有する。駆動部１３０は、２つの空間１１６Ａ，１１６Ｂへ流入／流出する流体を操作することにより、第１部材１１２と第２部材１２０との相対的な変位量を制御する。フィードバックコントローラ１３４は、変位量ＰＦＢが目標値ＰＲＥＦに近づくように制御指令ＣＮＴ１を生成する。ノッチフィルタ１３６は制御指令ＣＮＴ１の経路上に設けられ、変位量（ＰＦＢあるいはＰＲＥＦ）に応じて阻止周波数ｆＮが制御可能に構成される。【選択図】図１