SEMICONDUCTOR STORAGE DEVICE

• Main Authors: IIJIMA JUN, TAGAMI MASAYOSHI, NISHIMURA TAKAHITO, USUI TAKAMASA
• Format: Patent
• Language: English; Japanese
• Published: 03.10.2019
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

To provide a semiconductor storage device capable of suppressing reduction in formation density of memory cells, and of improving electric characteristics.SOLUTION: A semiconductor storage device comprises a substrate, a laminate, a plurality of columnar parts CL, a plurality of connection parts 40,...