ULTRASONIC SENSOR
To provide an ultrasonic sensor that can suitably connect upper electrodes to each other.SOLUTION: A sensor 1 comprises: a support layer 25; a plurality of piezoelectric material parts 27; a plurality of upper electrodes 29; a plurality of bridge parts 19; and a plurality of upper wires 31. The plur...
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Main Author | |
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Format | Patent |
Language | English Japanese |
Published |
26.09.2019
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Subjects | |
Online Access | Get full text |
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Summary: | To provide an ultrasonic sensor that can suitably connect upper electrodes to each other.SOLUTION: A sensor 1 comprises: a support layer 25; a plurality of piezoelectric material parts 27; a plurality of upper electrodes 29; a plurality of bridge parts 19; and a plurality of upper wires 31. The plurality of piezoelectric material parts 27 are arranged in a plane direction on the support layer 25 to form a plurality of columns 3 and separated from each other in the plurality of columns 3. The plurality of upper electrodes 29 are arranged on the plurality of piezoelectric material parts 27. The plurality of bridge parts 19 have insulating properties and are located on the support layer 25, and each connect the piezoelectric material parts 27 adjacent to each other in the same column 3. The plurality of upper wires 31 are located on the plurality of bridge parts 19 and each connect the upper electrodes 29 adjacent to each other in the same column.SELECTED DRAWING: Figure 1
【課題】上部電極同士を好適に接続できる超音波センサを提供する。【解決手段】センサ1は、支持層25と、複数の圧電体部27と、複数の上部電極29と、複数の橋部19と、複数の上部配線31とを有している。複数の圧電体部27は、支持層25上にて平面方向に配列されて複数の列3をなしており、複数の列3の間で互いに分離されている。複数の上部電極29は、複数の圧電体部27上に位置している。複数の橋部19は、絶縁性であり、支持層25上に位置しており、それぞれ、同一の列3内において互いに隣り合う圧電体部27同士をつないでいる。複数の上部配線31は、複数の橋部19上に位置しており、それぞれ、同一の列内において互いに隣り合う上部電極29同士を接続している。【選択図】図1 |
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Bibliography: | Application Number: JP20180051202 |