OPTICAL SEMICONDUCTOR MODULE AND MANUFACTURING METHOD OF THE SAME

To provide an optical semiconductor module capable of reducing costs and a method for manufacturing the same.SOLUTION: Reflectance of light emitted from a semiconductor laser at an interface between a second surface of a first silicon substrate and a film is lower than reflectance of the light emitt...

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Bibliographic Details
Main Author FURUYAMA HIDETO
Format Patent
LanguageEnglish
Japanese
Published 26.09.2019
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Summary:To provide an optical semiconductor module capable of reducing costs and a method for manufacturing the same.SOLUTION: Reflectance of light emitted from a semiconductor laser at an interface between a second surface of a first silicon substrate and a film is lower than reflectance of the light emitted from the semiconductor laser is lower than the reflectance at the interface between the second surface of the first silicon substrate and the lens member. Reflectance of the light received by a light receiving element at an interface between the fourth surface of a second silicon substrate and the film is lower than reflectance of light received by the light receiving element at an interface between the fourth surface of the second silicon substrate and a lens member.SELECTED DRAWING: Figure 1 【課題】低コスト化が可能な光半導体モジュール及びその製造方法を提供する。【解決手段】半導体レーザが出射する光の、第1シリコン基板の第2面と膜との界面での反射率は、半導体レーザが出射する光の、第1シリコン基板の第2面とレンズ部材との界面での反射率よりも低い。受光素子が受光する光の、第2シリコン基板の第4面と膜との界面での反射率は、受光素子が受光する光の、第2シリコン基板の第4面とレンズ部材との界面での反射率よりも低い。【選択図】図1
Bibliography:Application Number: JP20180051066