Co-Ni-BASED ALLOY DIAPHRAGM AND METHOD FOR PRODUCING THE SAME

• Main Authors: KAMATA TAKASHI, SATO HIDETOMO
• Format: Patent
• Language: English; Japanese
• Published: 26.09.2019
• Subjects: ALLOYS; BLASTING; CHEMISTRY; CYLINDERS; ENGINEERING ELEMENTS AND UNITS; FERROUS OR NON-FERROUS ALLOYS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS; HEATING; LIGHTING; MECHANICAL ENGINEERING; METALLURGY; PISTONS; SEALINGS; THERMAL INSULATION IN GENERAL; TREATMENT OF ALLOYS OR NON-FERROUS METALS; WEAPONS

To provide a metal diaphragm that can improve chemical stability of a semiconductor process used herein and is suitable for valves or the like and a method of producing the same.SOLUTION: A Co-Ni-based alloy diaphragm has a composition consisting of Co: 30 mass% or more and 40 mass% or less, Ni: 27...