MEASURING DEVICE

• Main Authors: TERAUCHI TATSUYA, USUI TOMOHIRO, KIYOTANI SHINGO, KOBAYASHI KANAE
• Format: Patent
• Language: English; Japanese
• Published: 19.09.2019
• Subjects: MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

To provide a measuring device that acquires a measured value with high accuracy even when a probe is displaced in conjunction with deformation of a moving body.SOLUTION: A three-dimensional measuring device 1 comprises: a probe 40 for measuring a workpiece; a moving body 21 which, while supporting the probe 40, moves upon receiving driving force from a drive unit 32; a position detection unit 843 for detecting a position of the moving body 21 when the probe 40 measures the workpiece in conjunction with movement of the moving body 21; a displacement acquisition unit 844 for acquiring displacement of the probe 40 due to deformation of the moving body 21 when the moving body 21 moves, on the basis of a detection result of a detection sensor 50 provided in the moving body 21; and a measured value acquisition unit 845 for acquiring a measured value of the workpiece on the basis of the position of the moving body 21 detected by the position detection unit 843 and the displacement of the probe 40 acquired by the displacement acquisition unit 844.SELECTED DRAWING: Figure 1 【課題】移動体の変形に起因してプローブが変位しても高精度に測定値を取得する測定装置を提供する。【解決手段】三次元測定装置１は、ワークを測定するプローブ４０と、プローブ４０を支持した状態で、駆動部３２からの駆動力を受けて移動する移動体２１と、プローブ４０が移動体２１の移動に伴いワークを測定する際の移動体２１の位置を検出する位置検出部８４３と、移動体２１に設けられた検出センサ５０の検出結果に基づいて、移動体２１が移動する際の移動体２１の変形に伴うプローブ４０の変位を取得する変位取得部８４４と、位置検出部８４３によって検出された移動体２１の位置と、変位取得部８４４によって取得されたプローブ４０の変位とに基づいて、ワークの測定値を取得する測定値取得部８４５とを備える。【選択図】図１