OZONE-DISSOLVED WATER MANUFACTURING APPARATUS AND OZONE-DISSOLVED WATER MANUFACTURING METHOD

• Main Authors: TOKOSHIMA HIROTO, SASAKI YUYA
• Format: Patent
• Language: English; Japanese
• Published: 12.09.2019
• Subjects: CHEMISTRY; COMPOUNDS THEREOF; INORGANIC CHEMISTRY; METALLURGY; MIXING, e.g. DISSOLVING, EMULSIFYING, DISPERSING; NON-METALLIC ELEMENTS; PERFORMING OPERATIONS; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; TRANSPORTING; TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE

To provide an apparatus and a method for manufacturing ozone-dissolved water capable of manufacturing ozone-dissolved water in which ozone gas is dissolved in a liquid such as ultrapure water with high dissolution efficiency.SOLUTION: The present invention provides an apparatus and a method for manufacturing ozone-dissolved water, including a gas-dissolved membrane module 1 in which a gas-phase chamber 12 and a liquid-phase chamber 13 are partitioned by a gas-dissolved membrane 11, a gas supply line L1 that communicates with the gas-phase chamber 12 and can supply an ozone-containing gas G; a gas discharge line L2 that communicates with the gas-phase chamber 12 and can discharge the treated surplus gas G, a liquid supply line L3 that communicates with the liquid phase chamber 13 and can supply the treated water W, a liquid discharge line L4 that communicates with the liquid phase chamber 13 and can discharge the treated ozone-dissolved water W, a first pressure gauge 2 connected to the liquid discharge line L4, a second pressure gauge 3 connected to the gas discharge line L2, a pressure control mechanism 5 that controls the pressure of the gas in the gas phase chamber 12, and a moisture removal mechanism 4 that removes moisture contained in the surplus gas G.SELECTED DRAWING: Figure 1 【課題】高い溶解効率でオゾンガスを超純水等の液体に溶解させたオゾン溶解水を製造することができるオゾン溶解水の製造装置及び製造方法の提供。【解決手段】ガス溶解膜１１により気相室１２と液相室１３とが区画形成されたガス溶解膜モジュール１と、気相室１２に連通し、オゾン含有ガスＧを供給可能な気体供給ラインＬ１と、気相室１２に連通し、処理後の余剰ガスＧＲを排出可能な気体排出ラインＬ２と、液相室１３に連通し、被処理水Ｗを供給可能な液体供給ラインＬ３と、液相室１３に連通し、処理後のオゾン溶解水ＷＯを排出可能な液体排出ラインＬ４と、液体排出ラインＬ４に接続された、第一圧力計２と、気体排出ラインＬ２に接続された、第二圧力計３と、気相室１２内の気体の圧力を制御する圧力制御機構５と、余剰ガスＧＲに含まれる水分を除去する水分除去機構４とを備えるオゾン溶解水の製造装置及び製造方法。【選択図】図１