MICRO FLUID CONTROL DEVICE

• Main Authors: LIN ZHI FENG, CAI CHANG YAN, CHEN SHIH CHANG, MO HAO RAN, ZHANG YING LUN, HUANG QI FENG, HAN YONG LONG
• Format: Patent
• Language: English; Japanese
• Published: 29.08.2019
• Subjects: BLASTING; HEATING; LIGHTING; MECHANICAL ENGINEERING; POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS; WEAPONS

To provide a micro fluid control device, adjust a spacing between a resonance plate and a piezoelectric actuator easily and accurately and provide a stable transportation efficiency.SOLUTION: A micro fluid control device 1 comprises an input supply plate 11; a resonance plate 12; and a piezoelectric...