MICRO FLUID CONTROL DEVICE

• Main Authors: LIN ZHI FENG, CAI CHANG YAN, CHEN SHIH CHANG, MO HAO RAN, ZHANG YING LUN, HUANG QI FENG, HAN YONG LONG
• Format: Patent
• Language: English; Japanese
• Published: 29.08.2019
• Subjects: BLASTING; HEATING; LIGHTING; MECHANICAL ENGINEERING; POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS; WEAPONS

To provide a micro fluid control device, adjust a spacing between a resonance plate and a piezoelectric actuator easily and accurately and provide a stable transportation efficiency.SOLUTION: A micro fluid control device 1 comprises an input supply plate 11; a resonance plate 12; and a piezoelectric actuator 13. The resonance plate is arranged to be connected to the input supply plate. The piezoelectric actuator is arranged to be connected to the resonance plate, comprises a hanging plate 131, an outer frame 132, at least one bracket 133 and a piezoelectric element 134. The outer frame is arranged to enclose an outer side of the hanging plate and has a fixing surface 132a. At least one bracket described above is connected between the hanging plate and the outer frame and supplies an elastic force to support the hanging plate. The bracket is formed between the hanging plate and the outer frame to cause the first surface of the hanging plate and the fixing surface of the outer frame to be formed not to be the same plane and further a chamber space is held between the first surface of the hanging plate and the resonance plate.SELECTED DRAWING: Figure 3 【課題】マイクロ流体制御装置を提供し、容易且つ正確に共振板と圧電アクチュエーターとの間にある間隔を調整し、安定な輸送効率を提供する。【解決手段】マイクロ流体制御装置１は、入気板１１と、共振板１２と、圧電アクチュエーター１３とを備え、前記共振板は、前記入気板に結合されるように設けられ、前記圧電アクチュエーターは、前記共振板に結合されるように設けられ、懸吊板１３１と、外枠１３２と、少なくとも１つのブラケット１３３と、圧電素子１３４とを含み、前記外枠は、前記懸吊板の外側を囲むように設けられ、且つ取付け表面１３２ａを有し、前記少なくとも１つのブラケットは、前記懸吊板と前記外枠との間に連結され、弾性力を提供して前記懸吊板を支持し、前記懸吊板と前記外枠との間に形成され、懸吊板の第１表面と外枠の取付け表面とを同一平面でないように形成させ、且つ、懸吊板の第１表面と共振板との間に、チャンバー間隔を保持する。【選択図】図３