YTTRIUM OXY FLUORIDE POWDER THERMAL SPRAY MATERIAL AND METHOD FOR MANUFACTURING YTTRIUM OXY FLUORIDE THERMAL SPRAY MEMBER

• Main Authors: HAMAYA NORIAKI, TAKAI YASUSHI
• Format: Patent
• Language: English; Japanese
• Published: 22.08.2019
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

SOLUTION: There is provided a rare earth element oxy fluoride powder thermal spray material consisting of powder including a yttrium oxy fluoride and having: a particle shape having an aspect ratio of 2 or less; an average particle size (Dof a mass reference) of 28 μm or more and 48 μm or less; a bulk density of 0.8 g/cmor more and 2 g/cmor less; carbon of 0.5 mass% or less; and oxygen of 3 mass% or more and 15 mass% or less.EFFECT: The rare earth element oxy fluoride powder thermal spray material suitable for plasma spray in the atmosphere can be obtained. A rare earth element fluoride thermal spray member manufactured using the rare earth element oxy fluoride powder thermal spray material is excellent in corrosion resistance to plasma etching and can achieve a longer life compared with a member obtained by forming a thermal spray coating of rare earth oxide or rare earth fluoride when used as a plasma resistant member in halogen gas.SELECTED DRAWING: None 【解決手段】イットリウムのオキシフッ化物を含む粉末からなる溶射材料であり、その粒子の外形のアスペクト比が２以下、平均粒子径（質量基準のＤ50）が２８μｍ以上４８μｍ以下、嵩密度が０．８ｇ／ｃｍ3以上２ｇ／ｃｍ3以下、炭素を０．５質量％以下、酸素を３質量％以上１５質量％以下含有することを特徴とする希土類元素オキシフッ化物粉末溶射材料。【効果】本発明によれば、大気中プラズマ溶射に適した希土類元素オキシフッ化物粉末溶射材料を得ることができる。本発明の希土類元素オキシフッ化物粉末溶射材料を用いて製造した希土類元素フッ化物溶射部材はハロゲンガス中での耐プラズマ部材として使用した場合、希土類酸化物や希土類フッ化物の溶射皮膜を形成したものに比べて、プラズマエッチングに対する耐食性に優れ、より長い寿命を実現できる部材となる。【選択図】なし