REFLECTIVE ANODE ELECTRODE FOR ORGANIC EL DISPLAY

• Main Authors: TERAMAE YUMI, TAUCHI HIRONORI
• Format: Patent
• Language: English; Japanese
• Published: 15.08.2019
• Subjects: ADVERTISING; BASIC ELECTRIC ELEMENTS; CRYPTOGRAPHY; DISPLAY; DISPLAYING; EDUCATION; ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; LABELS OR NAME-PLATES; PHYSICS; SEALS; SEMICONDUCTOR DEVICES; SIGNS

To provide a reflective anode electrode for organic EL display comprising a novel Al alloy reflective film capable of securing low contact resistance and high reflectivity even in a case where the Al alloy reflective film is brought into direct contact with an oxide conductive film such as ITO or IZO.SOLUTION: The present invention relates to a reflective anode electrode for organic EL display consisting of a laminated structure comprising an Al-Ge-based alloy film and an oxide conductive film in contact with the Al-Ge-based alloy film and interposing a layer containing aluminium oxide as a main component on a contact interface thereof. The Al-Ge-based alloy film contains Ge in 0.1-2.5 atom%, and a Ge concentrated layer and a Ge containing deposit are formed on the contact interface of the Al-Ge-based alloy film and the oxide conductive film. In the Al-Ge-based alloy film, an average Ge concentration within 50 nm from a surface closer to the oxide conductive film is twice or more as much as an average Ge concentration in the Al-Ge-based alloy film, and an average diameter of the Ge containing deposit is 0.1 μm or more.SELECTED DRAWING: Figure 1 【課題】Ａｌ合金反射膜をＩＴＯやＩＺＯなどの酸化物導電膜と直接接触させても、低い接触抵抗と高い反射率を確保することができる、新規なＡｌ合金反射膜を備えた有機ＥＬディスプレイ用の反射アノード電極を提供する。【解決手段】Ａｌ−Ｇｅ系合金膜と、Ａｌ−Ｇｅ系合金膜に接触する酸化物導電膜とを備える積層構造からなり、これらの接触界面に酸化アルミニウムを主成分とする層が介在する有機ＥＬディスプレイ用の反射アノード電極であって、Ａｌ−Ｇｅ系合金膜は、Ｇｅを０．１〜２．５原子％含有するとともに、Ａｌ−Ｇｅ系合金膜と酸化物導電膜との接触界面には、Ｇｅ濃化層およびＧｅ含有析出物が形成されており、Ａｌ−Ｇｅ系合金膜における、酸化物導電膜側の表面から５０ｎｍ以内の平均Ｇｅ濃度が、Ａｌ−Ｇｅ系合金膜中の平均Ｇｅ濃度の２倍以上であり、かつ、Ｇｅ含有析出物の平均直径が０．１μｍ以上である。【選択図】図１