DISCHARGE DEVICE AND IMPRINT DEVICE

• Main Authors: HASEGAWA TAKAYASU, NANBA HISASHI, KATSUTA KEN
• Format: Patent
• Language: English; Japanese
• Published: 25.07.2019
• Subjects: AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING; APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL; BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PERFORMING OPERATIONS; SEMICONDUCTOR DEVICES; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR; SHAPING OR JOINING OF PLASTICS; SPRAYING OR ATOMISING IN GENERAL; TRANSPORTING; WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL

To provide a discharge device capable of suppressing a discharge failure and damage of a mold, and an imprint device.SOLUTION: A discharge head includes a discharge member 11 and a housing member and is connected to a pressure control member through a pipeline with a joint. The housing member is divided into a housing part and a filling liquid part by a separation membrane of a flexible member inside. The discharge member includes discharge ports for discharging imprint materials and pressure chambers 34 communicating with the discharge ports. The imprint materials are discharged onto a substrate from the discharge ports by controlling an energy generation element with a controller to causing pressure fluctuation in the pressure chambers. The shape of a gas-liquid interface (meniscus) in the discharge member is stabilized by controlling the pressure of a filling liquid with the pressure control member with the imprint materials blocked from the outside, and the imprint materials having high reproducibility are discharged. Also, the discharge head includes deaeration means 50 for collecting gas dissolved in the imprint materials, and a circulation pump 22.SELECTED DRAWING: Figure 4 【課題】吐出不良およびモールドの破損を抑制できる吐出装置、およびインプリント装置を提供する。【解決手段】吐出ヘッドは、吐出部材１１と収容部材とを備えており、圧力制御部材と配管を介して継手で接続されている。収容部材は内部が可撓性部材の分離膜によって収容部と充填液部とに分けられている。吐出部材はインプリント材を吐出する吐出口と、吐出口と連通した圧力室３４とを備えている。エネルギ発生素子をコントローラで制御して圧力室に圧力変動を生じさせることで、インプリント材を吐出口から基板上に吐出する。インプリント材を外部と遮断した状態で、圧力制御部材で充填液の圧力を制御することで、吐出部材における気液界面（メニスカス）の形状を安定化させ、再現性のよいインプリント材の吐出を行う。また、前記インプリント材に溶存する気体を回収する脱気手段５０と、循環ポンプ２２を備えている。【選択図】図４