OPTICAL PROCESSING APPARATUS, OPTICAL PROCESSING METHOD, AND METHOD FOR MANUFACTURING OPTICALLY PROCESSED PRODUCT

• Main Author: TAMURA ASATO
• Format: Patent
• Language: English; Japanese
• Published: 25.07.2019
• Subjects: CHEMISTRY; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; GLASS; MACHINE TOOLS; MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES; METAL-WORKING NOT OTHERWISE PROVIDED FOR; METALLURGY; MINERAL OR SLAG WOOL; PERFORMING OPERATIONS; SOLDERING OR UNSOLDERING; TRANSPORTING; WELDING; WORKING BY LASER BEAM

To realize large volume processing with less energy by an optical processing apparatus.SOLUTION: An optical processing apparatus processes a processing object 100 by using a plurality of pieces of processing light. A first light irradiation means irradiates first processing light L1 so that a focal position is located inside the processing object. A second light irradiation means irradiates second processing light L2 including a light absorption wavelength of plasma or gas P that is generated inside the processing object by the first processing light.SELECTED DRAWING: Figure 3 【課題】光加工装置によって少ないエネルギーで大きな体積の加工を実現することを課題とする。【解決手段】複数の加工光を用いて加工対象物１００を加工する光加工装置であって、第一光照射手段により焦点位置が前記加工対象物の内部に位置するように第一加工光Ｌ１を照射し、該第一加工光によって加工対象物内部に発生するプラズマ又は気体Ｐの光吸収波長を含む第二加工光Ｌ２を第二光照射手段により照射することを特徴としている。【選択図】図３