VIBRATION DEVICE, CIRCUIT ARRANGEMENT, MANUFACTURING METHOD OF THE VIBRATION DEVICE, ELECTRONIC APPARATUS, AND MOVING BODY

• Main Author: KIYA HIROSHI
• Format: Patent
• Language: English; Japanese
• Published: 22.07.2019
• Subjects: BASIC ELECTRONIC CIRCUITRY; ELECTRICITY; GENERATION OF NOISE BY SUCH CIRCUITS; GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING,BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN ANON-SWITCHING MANNER

To provide a vibration device and a circuit arrangement or the like, capable of achieving improvement of a stable support a vibrator and vibration characteristics of the vibrator.SOLUTION: A vibration device 2 includes: a vibrator 10 having first and second electrodes 12 and 13; and a circuit arrangement 20 having a driving circuit 30 that drives the vibrator 10, and an output circuit 22 outputting a monitor signal MNT in accordance with vibration characteristics of the vibrator 10 at the time of being driven by the driving circuit 30. The circuit arrangement 20 includes: a first terminal T1 electrically connected to the first electrodes 12, and outputting an output signal to the vibrator 10 from the driving circuit 30; a second terminal T2 electrically connected to the second electrodes 13, and inputting an input signal to the driving circuit 30 from the vibrator 10; a third terminal T3 electrically non-connected to the first and second electrodes 12 and 13 of the vibrator 10; and a monitor terminal TM to which the monitor signal MNT is output. The vibrator 10 is supported onto an active surface AF side of the circuit arrangement 20 by using conductive bumps B1, B2, and B3 provided to the first, second, and third terminals T1, T2, and T3.SELECTED DRAWING: Figure 2 【課題】振動子の安定した支持と振動子の振動特性の向上を実現できる振動デバイス、回路装置等の提供。【解決手段】振動デバイス２は、第１及び第２の電極１２、１３を有する振動子１０と、振動子１０を駆動する駆動回路３０、及び駆動回路３０により駆動されているときの振動子１０の振動特性に応じたモニター信号ＭＮＴを出力する出力回路２２を有する回路装置２０を含む。回路装置２０は、第１の電極１２に電気的に接続され、駆動回路３０から振動子１０への出力信号が出力される第１の端子Ｔ１と、第２の電極１３に電気的に接続され、振動子１０から駆動回路３０への入力信号が入力される第２の端子Ｔ２と、振動子１０の第１及び第２の電極１２、１３に電気的に非接続の第３の端子Ｔ３と、モニター信号ＭＮＴが出力されるモニター端子ＴＭを含む。振動子１０は、第１、第２及び第３の端子Ｔ１、Ｔ２、Ｔ３に設けられた導電性バンプＢ１、Ｂ２、Ｂ３を用いて回路装置２０の能動面ＡＦ側に支持される。【選択図】図２