EFEM AND GAS REPLACEMENT METHOD OF THE EFEM

• Main Authors: EMOTO ATSUSHI, KUDO TAKUYA, IWAMOTO TADAMASA
• Format: Patent
• Language: English; Japanese
• Published: 22.07.2019
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

To provide a load port device or the like, capable of preferably adjusting a posture of a door.SOLUTION: A load port device includes: a frame having a device open; a door that is detachably engaged to a lid of a wafer conveying container, and opens and closes the lid and the device open; a door driving part that makes the door to move through the movable arm part between a closing position having a movable arm part connected to the door, and closes the device open with the door and an opening position that the door opens the device open; and a door adjustment part installed at a connection position of the door and the movable arm part, and adjusting a posture of the door.SELECTED DRAWING: Figure 3 【課題】ドアの姿勢を好適に調整し得るロードポート装置等を提供する。【解決手段】装置開口を有するフレームと、ウエハ搬送容器の蓋に着脱自在に係合し、前記蓋および前記装置開口を開閉するドアと、前記ドアに接続する可動アーム部を有しており、前記ドアが前記装置開口を塞ぐ閉止位置と、前記ドアが前記装置開口を開放する開放位置との間で、前記可動アーム部を介して前記ドアを移動させるドア駆動部と、前記ドアと前記可動アーム部との接続位置に設けられており、前記ドアの姿勢を調整するドア調整部と、を有するロードポート装置。【選択図】図３