EFEM AND GAS REPLACEMENT METHOD OF THE EFEM

To provide a load port device or the like, capable of preferably adjusting a posture of a door.SOLUTION: A load port device includes: a frame having a device open; a door that is detachably engaged to a lid of a wafer conveying container, and opens and closes the lid and the device open; a door driv...

Full description

Saved in:
Bibliographic Details
Main Authors EMOTO ATSUSHI, KUDO TAKUYA, IWAMOTO TADAMASA
Format Patent
LanguageEnglish
Japanese
Published 22.07.2019
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Online AccessGet full text

Cover

More Information
Summary:To provide a load port device or the like, capable of preferably adjusting a posture of a door.SOLUTION: A load port device includes: a frame having a device open; a door that is detachably engaged to a lid of a wafer conveying container, and opens and closes the lid and the device open; a door driving part that makes the door to move through the movable arm part between a closing position having a movable arm part connected to the door, and closes the device open with the door and an opening position that the door opens the device open; and a door adjustment part installed at a connection position of the door and the movable arm part, and adjusting a posture of the door.SELECTED DRAWING: Figure 3 【課題】ドアの姿勢を好適に調整し得るロードポート装置等を提供する。【解決手段】装置開口を有するフレームと、ウエハ搬送容器の蓋に着脱自在に係合し、前記蓋および前記装置開口を開閉するドアと、前記ドアに接続する可動アーム部を有しており、前記ドアが前記装置開口を塞ぐ閉止位置と、前記ドアが前記装置開口を開放する開放位置との間で、前記可動アーム部を介して前記ドアを移動させるドア駆動部と、前記ドアと前記可動アーム部との接続位置に設けられており、前記ドアの姿勢を調整するドア調整部と、を有するロードポート装置。【選択図】図３
Bibliography:Application Number: JP20180002838