VACUUM PUMP, DEVICE FOR DETECTING DEPOSIT FOR VACUUM PUMP AND METHOD FOR DETECTING DEPOSIT FOR VACUUM PUMP

• Main Author: ENOMOTO YOSHIHIRO
• Format: Patent
• Language: English; Japanese
• Published: 22.07.2019
• Subjects: BLASTING; HEATING; LIGHTING; MECHANICAL ENGINEERING; NON-POSITIVE DISPLACEMENT PUMPS; POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENTMACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENTPUMPS; WEAPONS

To provide a vacuum pump that can determine proper overhaul timing, and to provide a device for detecting deposit for a vacuum pump and a method for detecting deposit for a vacuum pump.SOLUTION: A vacuum pump 1 includes: a vibration sensor 82 for detecting contact between a rotor 20 and deposit; and control unit 60 determination means for detecting a current value of a motor 30 for rotatably driving the rotor 20 and, when the vibration sensor 82 detects contact between the rotor 20 and deposit while the current value is equal to or larger than a specified value, determining that the vacuum pump 1 needs overhaul.SELECTED DRAWING: Figure 3 【課題】オーバーホール時期を適切に判定可能な真空ポンプ及び真空ポンプの堆積物検知装置並びに真空ポンプの堆積物検知方法を提供する。【解決手段】真空ポンプ１は、ロータ２０と堆積物との接触を検知する振動センサ８２と、ロータ２０を回転駆動させるモータ３０の電流値を検出すると共に、この電流値が所定値以上の状態で振動センサ８２がロータ２０と堆積物との接触を検知した場合に、真空ポンプ１のオーバーホールが必要であると判定する制御ユニット６０判定手段と、を備えている。【選択図】図３