STRAIN SENSOR MANUFACTURING DEVICE, STRAIN SENSOR MANUFACTURING METHOD, AND STRAIN SENSOR INSPECTION METHOD

• Main Authors: GOKO MICHIHISA, SAKAIDA ATSUSUKE, TANIGUCHI TOSHIHISA, SHIRAISHI YOSHIHIKO, ASANO MASAHIRO, OKAMOTO KEIJI
• Format: Patent
• Language: English; Japanese
• Published: 18.07.2019
• Subjects: MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; TESTING

To provide a strain sensor manufacturing device with which it is possible to obtain the relationship of a frequency and a sensor signal.SOLUTION: A strain sensor comprises a sensor holder 250 in which a strain sensor is arranged on the outer wall surface, with a center axis as a first axis C, a fixing member 350 for pressing the strain sensor and holding it and arranged on the outer wall surface side of the sensor holder 250, and a rotating member 310 arranged in a hollow part and capable of rotating around a second axis R parallel to the first axis C as the axis of rotation. The second axis R of the rotating member 310 is eccentric to the first axis C, and when it rotates, an external force is applied to an inner wall surface of the sensor holder 250 sequentially along the circumferential direction of the inner wall surface. The external force applied to an elastic deformation member of the strain sensor is cyclically changed as the rotating member 310 is rotated, and, by cyclically changing the elastic deformation member, a sensor signal corresponding to the deformation of the elastic deformation member is outputted from a heat flux sensor.SELECTED DRAWING: Figure 4 【課題】周波数とセンサ信号との関係を得ることができる歪みセンサの製造装置を提供する。【解決手段】中心軸を第１軸Ｃとし、外壁面に歪みセンサが配置されるセンサホルダ２５０と、センサホルダ２５０の外壁面側に配置され、歪みセンサを押圧して保持する固定部材３５０と、中空部内に配置され、第１軸Ｃに沿った第２軸Ｒを回転軸として回転可能とされた回転部材３１０を備えている。回転部材３１０は、第２軸Ｒが第１軸Ｃに対して偏芯し、回転すると、センサホルダ２５０の内壁面に外力を当該内壁面の周方向に沿って順に印加する構成とする。そして、回転部材３１０を回転させることで歪みセンサの弾性変形部材に印加される外力が周期的に変化されるようにし、弾性変形部材を周期的に変形させて熱流束センサから弾性変形部材の変形に応じたセンサ信号を出力させる。【選択図】図４