SLIDING MEMBER

• Main Authors: SHINOHARA AKIO, TSUJI KATSUHIRO
• Format: Patent
• Language: English; Japanese
• Published: 18.07.2019
• Subjects: CHEMICAL SURFACE TREATMENT; CHEMISTRY; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; COATING MATERIAL WITH METALLIC MATERIAL; COATING METALLIC MATERIAL; DIFFUSION TREATMENT OF METALLIC MATERIAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL; METALLURGY; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION

To provide a sliding member including a hard carbon film having high adhesion even on severe sliding conditions.SOLUTION: A sliding member used under oil lubrication comprises: a base material 10; an intermediate layer 12 formed on the base material and having a thickness of 0.010 μm or more and 0.6 μm or less; and a hard carbon film 14 formed on the intermediate layer and having a hydrogen content of 10 atom% or less. The area ratio of depressions and projections on a surface of the hard carbon film 14 is 12% or less; when a cross section in the vicinity of an interface between the hard carbon film and the intermediate layer is observed by a transmission electron microscope, the number of linear low density carbon parts 16 observed in a region of 300 nm in height from the interface and 5,000 nm in width is 12 or less.SELECTED DRAWING: Figure 1 【課題】厳しい摺動条件下でも高い密着性を有する硬質炭素被膜を有する摺動部材を提供する。【解決手段】基材１０と、該基材上に形成された厚さ０．０１０μｍ以上０．６μｍ以下の中間層１２と、該中間層上に形成された水素含有量が１０原子％以下の硬質炭素被膜１４と、を有し、前記硬質炭素被膜１４の表面の凹部及び凸部の面積率が１２％以下であり、前記硬質炭素被膜の前記中間層との界面近傍の断面を透過型電子顕微鏡で観察したときに、前記界面から高さ３００ｎｍ、幅５０００ｎｍの領域内に認められる線状の低密度炭素部１６の数が１２箇所以下であることを特徴とする、オイル潤滑下で使用される摺動部材。【選択図】図１