LIGHT IRRADIATION DEVICE
To provide a light irradiation device which can remove electric charges from a processed body even if the processed body is electrified.SOLUTION: A light irradiation device for irradiating an ultraviolet ray to one face of a band-shaped processed body which is transported along a transport path comp...
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Main Authors | , |
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Format | Patent |
Language | English Japanese |
Published |
04.07.2019
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Subjects | |
Online Access | Get full text |
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Summary: | To provide a light irradiation device which can remove electric charges from a processed body even if the processed body is electrified.SOLUTION: A light irradiation device for irradiating an ultraviolet ray to one face of a band-shaped processed body which is transported along a transport path comprises: a lamp house having an opening along a passage plane of the one-face side of the processed body in the transport path; an ultraviolet ray lamp arranged in the lamp house, and extending to a width direction of the processed body; gas supply means for supplying a processing-space gas containing an inactive gas in the lamp house; and a charge removal mechanism arranged in the vicinity of at least either of a carry-in port being the inside of the lamp house, or the outside of the lamp house into which the processed body in the lamp house is carried in, and a carry-out port from which the processed body is carried out, and removing electric charges from the processed body.SELECTED DRAWING: Figure 3
【課題】 被処理体が帯電している場合にも、当該被処理体を除電することができる光照射装置の提供。【解決手段】 光照射装置は、搬送経路に沿って搬送される帯状の被処理体の一面に紫外線を照射する光照射装置であって、搬送経路における被処理体の一面側の通過平面に沿って開口を有するランプハウスと、前記ランプハウス内に設けられた、前記被処理体の幅方向に伸びる紫外線ランプと、前記ランプハウス内に不活性ガスを含有する処理空間用ガスを供給するガス供給手段と、前記ランプハウスの内部、または、前記ランプハウスの外部であって当該ランプハウスにおける前記被処理体が搬入される搬入口および前記被処理体が搬出される搬出口の少なくとも一方の近傍に設けられた、前記被処理体を除電する除電機構とを備えることを特徴とする。【選択図】 図3 |
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Bibliography: | Application Number: JP20170242310 |